 | Gas
Supply/Distribution |
| -
Gas supply cabinets
- Valve manifold boxes
- Gas piping runs |
|
| Chemical
Supply & Distribution |
| -
Chemical storage room
- Chemical delivery/service corridors |
|
| Wafer
Processing/Clean Room |
| -
Tool gas jungle
- Gas isolation panels
- Breathing zone |
|
| Abatement/Tool
Exhaust/Equipment Room |
| -
Pollution abatement systems
- General tool exhaust
- Vacuum pump enclosures |
|
